移测显微镜
based on the curvature of substrate and newton ring, a simple set for measuring the stress in films is designed, which consists of a he-ne laser, an extended lens, a convex lens and a travelling microscope with a spectroscope.
基于基片弯曲法和牛顿环的基本原理,使用He-Ne激光器、扩束镜、凸透镜和带分光镜的移测显微镜,搭建了薄膜应力测量装置。
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